DIRECT WRITE LITHOGRAPHY SYSTEM

Details for Australian Patent Application No. 2003224494 (hide)

Owner MAPPER LITHOGRAPHY IP B.V.

Inventors KRUIT, Pieter

Pub. Number AU-A-2003224494

PCT Number PCT/NL03/00206

PCT Pub. Number WO2003/079116

Priority 60/365,843 19.03.02 US

Filing date 19 March 2003

Wipo publication date 29 September 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 60/365,843 19.03.02 US

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2003224494

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003224495-PROCESS FOR THE PREPARATION OF ENANTIOMERICALLY ENRICHED COMPOUNDS

2003224493-A REGULATED RESONANT VOLTAGE CONVERTER AND A METHOD OF REGULATED RESONANCE DC-DC VOLTAGE CONVERSION