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Details for Australian Patent Application No. 2003224145 (hide)

Owner SIMOTEC GMBH

Inventors MULLER, Thomas; VOLKER, Benjamin

Pub. Number AU-A-2003224145

PCT Number PCT/EP03/04739

PCT Pub. Number WO2003/094207

Priority 202 07 138.3 06.05.02 DE

Filing date 6 May 2003

Wipo publication date 17 November 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 202 07 138.3 06.05.02 DE

8 January 2004 Application Open to Public Inspection

  Published as AU-A-2003224145

20 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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