PROGRAM-CONTROLLED DICING OF A SUBSTRATE USING A PULSED LASER

Details for Australian Patent Application No. 2003224098 (hide)

Owner XSIL TECHNOLOGY LIMITED

Inventors MEIGHAN, Oonagh; BOYLE, Adrian

Pub. Number AU-A-2003224098

PCT Number PCT/EP03/04069

PCT Pub. Number WO2003/090258

Priority S2002/0289 19.04.02 IE; 0225033.0 28.10.02 GB

Filing date 17 April 2003

Wipo publication date 3 November 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): S2002/0289 19.04.02 IE; 0225033.0 28.10.02 GB

11 December 2003 Application Open to Public Inspection

  Published as AU-A-2003224098

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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