PROJECTION METHOD AND PROJECTION SYSTEM COMPRISING AN OPTICAL FILTERING PROCESS

Details for Australian Patent Application No. 2003224088 (hide)

Owner CARL ZEISS SMT AG

Inventors WAGNER, Christian; BRUNOTTE, Martin; GRASCHUS, Volker; GRAUPNER, Paul

Pub. Number AU-A-2003224088

PCT Number PCT/EP03/04012

PCT Pub. Number WO2003/092256

Priority 102 18 989.7 24.04.02 DE

Filing date 17 April 2003

Wipo publication date 10 November 2003

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 102 18 989.7 24.04.02 DE

18 December 2003 Application Open to Public Inspection

  Published as AU-A-2003224088

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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