Owner Astec Halbleitertechnologie GmbH

Inventors Niese, Matthias; Schweckendiek, Jurgen; Franzke, Jorg

Agent Griffith Hack

Pub. Number AU-B-2003224015

PCT Number PCT/EP03/03312

PCT Pub. Number WO2003/085704

Priority 102 15 283.7 05.04.02 DE

Filing date 31 March 2003

Wipo publication date 20 October 2003

Acceptance publication date 29 January 2009

B65G 49/04 (2006.01) Conveying systems characterised by their application for specified purposes not otherwise provided for

H01L 21/304 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/306 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/673 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 21/683 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof