METHODS AND COMPUTER PROGRAM PRODUCTS FOR CHARACTERIZING A CRYSTALLINE STRUCTURE

Details for Australian Patent Application No. 2003223492 (hide)

Owner SEH AMERICA, INC.

Inventors MARTIN, Stephen, L.; OBA, Shigeru; SUZUKI, Yoshinori

Pub. Number AU-A-2003223492

PCT Number PCT/US03/10565

PCT Pub. Number WO2003/089873

Priority 10/124,901 18.04.02 US

Filing date 7 April 2003

Wipo publication date 3 November 2003

International Classifications

G01B 005/06 Measuring arrangements characterised by the use of mechanical means

G01B 007/06 Measuring arrangements characterised by the use of electric or magnetic means

G01B 011/06 Measuring arrangements characterised by the use of optical means - for measuring thickness

G01B 021/08 Measuring arrangements or details thereof in so far as they are not adapted to particular types of measuring means of the other groups of this subclass - for measuring thickness

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 10/124,901 18.04.02 US

11 December 2003 Application Open to Public Inspection

  Published as AU-A-2003223492

13 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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