CRITICAL DIMENSION CONTROL USING FULL PHASE AND TRIM MASKS

Details for Australian Patent Application No. 2003223189 (hide)

Owner NUMERICAL TECHNOLOGIES, INC.

Inventors PIERRAT, Christophe

Pub. Number AU-A-2003223189

PCT Number PCT/US03/05486

PCT Pub. Number WO2003/073166

Priority 60/359,909 26.02.02 US; 10/295,160 14.11.02 US

Filing date 25 February 2003

Wipo publication date 9 September 2003

International Classifications

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G03F 007/26 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Processing photosensitive materials

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

G06F 017/50 Digital computing or data processing equipment or methods, specially adapted for specific functions - Computer-aided design

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 60/359,909 26.02.02 US; 10/295,160 14.11.02 US

16 October 2003 Application Open to Public Inspection

  Published as AU-A-2003223189

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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