RADIATION PATTERNING TOOLS, AND METHODS OF FORMING RADIATION PATTERNING TOOLS

Details for Australian Patent Application No. 2003223161 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors DULMAN, Daniel, H.

Pub. Number AU-A-2003223161

PCT Number PCT/US03/02288

PCT Pub. Number WO2003/067330

Priority 10/072,440 05.02.02 US

Filing date 24 January 2003

Wipo publication date 2 September 2003

International Classifications

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

G03F 001/14 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals characterised by structural details, e.g. supports, cover layers, pellicle rings

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 10/072,440 05.02.02 US

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003223161

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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