A MASK BLANK AND A METHOD FOR PRODUCING THE SAME

Details for Australian Patent Application No. 2003223150 (hide)

Owner MICRONIC LASER SYSTEMS AB SANDSTROM, Torbjorn

Inventors SANDSTROM, Torbjorn

Pub. Number AU-A-2003223150

PCT Number PCT/SE03/00519

PCT Pub. Number WO2003/085362

Priority 0201019-7 04.04.02 SE

Filing date 1 April 2003

Wipo publication date 20 October 2003

International Classifications

G01F 001/08 Measuring volume flow

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 0201019-7 04.04.02 SE

27 November 2003 Application Open to Public Inspection

  Published as AU-A-2003223150

23 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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