METHOD AND DEVICE FOR PROTECTING ELECTRONIC, OPTOELECTRONIC AND/OR ELECTROMECHANICAL MICROCOMPONENTS

Details for Australian Patent Application No. 2003222895 (hide)

Owner PHS MEMS

Inventors PAINEAU, Sylvain; TOURNAIRE, Myriam; VIAL, Francois, Regis; SANDRI, Philippe; GARNIER, Amalia

Pub. Number AU-A-2003222895

PCT Number PCT/FR03/00406

PCT Pub. Number WO2003/067647

Priority 02/01571 08.02.02 FR

Filing date 7 February 2003

Wipo publication date 2 September 2003

International Classifications

H01L 021/50 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 023/10 Details of semiconductor or other solid state devices

B81B 007/00 Micro-structural systems

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 02/01571 08.02.02 FR

25 September 2003 Application Open to Public Inspection

  Published as AU-A-2003222895

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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