INTERFEROMETRIC MEASURING DEVICE AND PROJECTION ILLUMINATION INSTALLATION COMPRISING ONE SUCH MEASURING DEVICE

Details for Australian Patent Application No. 2003222799 (hide)

Owner CARL ZEISS SMT AG

Inventors SCHRIEVER, Martin; WEGMANN, Ulrich; HAIDNER, Helmut

Pub. Number AU-A-2003222799

PCT Number PCT/EP03/03566

PCT Pub. Number WO2003/087945

Priority 102 17 242.0 15.04.02 DE

Filing date 5 April 2003

Wipo publication date 27 October 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G01M 011/02 Testing of optical apparatus - Testing of optical properties

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 102 17 242.0 15.04.02 DE

4 December 2003 Application Open to Public Inspection

  Published as AU-A-2003222799

6 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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