METHOD FOR MAKING A SEMICONDUCTOR DEVICE BY VARIABLE CHEMICAL MECHANICAL POLISH DOWNFORCE

Details for Australian Patent Application No. 2003222240 (hide)

Owner MOTOROLA, INC., A CORPORATION OF THE STATE OF DELAWARE

Inventors GRANT, John, M.; KOBAYASHI, Thomas, S.

Pub. Number AU-A-2003222240

PCT Number PCT/US03/06208

PCT Pub. Number WO2003/077305

Priority 10/091,629 06.03.02 US

Filing date 26 February 2003

Wipo publication date 22 September 2003

International Classifications

H01L 021/3105 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 10/091,629 06.03.02 US

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003222240

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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