Thin film encapsulation of mems devices

Details for Australian Patent Application No. 2003222215 (hide)

International Classifications

Event Publications

7 August 2003 Complete Application Filed

Priority application(s): 10/076,559 19.02.02 US

9 October 2003 Application Open to Public Inspection

Published as AU-A-2003222215

15 June 2006 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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