REFRACTIVE PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY

Details for Australian Patent Application No. 2003221490 (hide)

Owner CARL ZEISS SMT AG

Inventors ROSTALSKI, Hans-Jurgen; ULRICH, Wilhelm

Pub. Number AU-A-2003221490

PCT Number PCT/EP03/01954

PCT Pub. Number WO2003/077037

Priority 102 10 899.4 08.03.02 DE

Filing date 26 February 2003

Wipo publication date 22 September 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 102 10 899.4 08.03.02 DE

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003221490

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003221491-METHOD FOR MOUNTING A CONCRETE COMPONENT AND FIXED TRACK

2003221489-A METHOD AND A DEVICE FOR OPTIMIZING A COMPANY STRUCTURE