PLASMA PROCESSING METHOD, SEASONING END DETECTION METHOD, AND PLASMA PROCESSING DEVICE

Details for Australian Patent Application No. 2003221362 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors TAKAYAMA, Naoki; OH, Hin; HARADA, Satoshi

Pub. Number AU-A-2003221362

PCT Number PCT/JP03/02932

PCT Pub. Number WO2003/077303

Priority 2002-66369 12.03.02 JP

Filing date 12 March 2003

Wipo publication date 22 September 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 2002-66369 12.03.02 JP

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003221362

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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