GAS MIXER, GAS REACTOR AND SURFACE MODIFYING DEVICE

Details for Australian Patent Application No. 2003221331 (hide)

Owner NOMURA, Shuzo

Inventors NOMURA, Shuzo

Pub. Number AU-A-2003221331

PCT Number PCT/JP03/02722

PCT Pub. Number WO2003/076059

Priority 2002/109776 08.03.02 JP; 2002/334332 15.10.02 JP

Filing date 7 March 2003

Wipo publication date 22 September 2003

International Classifications

B01F 005/00 Mixers

B01J 012/00 Chemical processes in general for reacting gaseous media with gaseous media

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 2002/109776 08.03.02 JP; 2002/334332 15.10.02 JP

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003221331

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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