MICRO ACTUATOR AND OPTICAL SWITCH USING THE ACTUATOR

Details for Australian Patent Application No. 2003221168 (hide)

Owner NIKON CORPORATION

Inventors SUZUKI, Junji; ISHIZUYA, Tohru

Pub. Number AU-A-2003221168

PCT Number PCT/JP03/03687

PCT Pub. Number WO2003/082731

Priority 2002-91426 28.03.02 JP; 2002-220368 29.07.02 JP; 2003-65051 11.03.03 JP

Filing date 26 March 2003

Wipo publication date 13 October 2003

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

G02B 026/02 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the intensity of light

G02B 026/08 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 2002-91426 28.03.02 JP; 2002-220368 29.07.02 JP; 2003-65051 11.03.03 JP

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003221168

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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