FIZEAU LENS, INTERFERENCE MEASURING DEVICE, INTERFERENCE MEASURING METHOD, METHOD OF MANUFACTURING PROJECTIVE OPTICAL SYSTEM, AND PROJECTIVE EXPOSURE DEVICE

Details for Australian Patent Application No. 2003221011 (hide)

Owner NIKON CORPORATION

Inventors GEMMA, Takashi

Pub. Number AU-A-2003221011

PCT Number PCT/JP03/04073

PCT Pub. Number WO2003/083408

Priority 2002-098516 01.04.02 JP

Filing date 31 March 2003

Wipo publication date 13 October 2003

International Classifications

G01B 009/02 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Interferometers

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G01B 011/24 Measuring arrangements characterised by the use of optical means - for measuring contours or curvatures

G01M 011/00 Testing of optical apparatus

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 013/24 Optical objectives specially designed for the purposes specified below - for reproducing or copying at short object distances

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 2002-098516 01.04.02 JP

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003221011

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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