SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD

Details for Australian Patent Application No. 2003221000 (hide)

Owner NEC CORPORATION

Inventors OHTAKE, Hiroto; TADA, Munehiro; HARADA, Yoshimichi; HIJIOKA, Ken'ichiro; SAITOH, Shinobu; HAYASHI, Yoshihiro

Pub. Number AU-A-2003221000

PCT Number PCT/JP03/04063

PCT Pub. Number WO2003/083935

Priority 2002-101873 03.04.02 JP

Filing date 31 March 2003

Wipo publication date 13 October 2003

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 2002-101873 03.04.02 JP

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003221000

23 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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