METHANOL-CONTAINING SILICABASED CMP COMPOSITIONS

Details for Australian Patent Application No. 2003220972 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors VACASSY, Robert

Pub. Number AU-A-2003220972

PCT Number PCT/US03/06717

PCT Pub. Number WO2003/076538

Priority 10/092,406 05.03.02 US

Filing date 5 March 2003

Wipo publication date 22 September 2003

International Classifications

C09G 001/02 Polishing compositions

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 10/092,406 05.03.02 US

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003220972

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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