SILICON MONOXIDE SINTERED PRODUCT AND SPUTTERING TARGET COMPRISING THE SAME

Details for Australian Patent Application No. 2003220872 (hide)

Owner SUMITOMO TITANIUM CORPORATION

Inventors OGASAWARA, Tadashi; WATANABE, Munetoshi; AZUMA, Kazuomi; IWASE, Toshiharu; NATSUME, Yoshitake

Pub. Number AU-A-2003220872

PCT Number PCT/JP03/03894

PCT Pub. Number WO2003/082769

Priority 2002-99515 02.04.02 JP

Filing date 27 March 2003

Wipo publication date 13 October 2003

International Classifications

C04B 035/01 Shaped ceramic products characterised by their composition - based on oxides

C23C 014/38 Coating by vacuum evaporation, by sputtering or by ion implantation

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 2002-99515 02.04.02 JP

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003220872

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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