ALIGNER AND DEVICE MANUFACURING METHOD

Details for Australian Patent Application No. 2003220867 (hide)

Owner NIKON CORPORATION

Inventors KOSUGI, Junichi; TANIGUCHI, Tetsuo; KOBAYASHI, Naoyuki; NAGAHASHI, Yoshitomo

Pub. Number AU-A-2003220867

PCT Number PCT/JP03/03003

PCT Pub. Number WO2003/079418

Priority 2002-072640 15.03.02 JP; 2003-002285 08.01.03 JP

Filing date 13 March 2003

Wipo publication date 29 September 2003

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/22 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposing sequentially with the same light pattern different positions of the same surface

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 2002-072640 15.03.02 JP; 2003-002285 08.01.03 JP

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2003220867

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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