Owner Kaneka Corporation

Inventors Yamamoto, Kenji; Yoshimi, Masashi; Suezaki, Takashi

Agent Griffith Hack

Pub. Number AU-B-2003220852

PCT Number PCT/JP03/04245

PCT Pub. Number WO2003/085746

Priority 2002-107133 09.04.02 JP

Filing date 2 April 2003

Wipo publication date 20 October 2003

Acceptance publication date 11 December 2008

H01L 31/075 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

H01L 21/00 (2006.01) Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 31/20 (2006.01) Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation