PLASMA PROCESSOR ELECTRODE AND PLASMA PROCESSOR

Details for Australian Patent Application No. 2003220819 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors MATSUSHIMA, Keiichi; SUZUKI, Takashi; FURUYA, Hajime

Pub. Number AU-A-2003220819

PCT Number PCT/JP03/03863

PCT Pub. Number WO2003/083922

Priority 2002-98053 29.03.02 JP

Filing date 27 March 2003

Wipo publication date 13 October 2003

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

7 August 2003 Complete Application Filed

  Priority application(s): 2002-98053 29.03.02 JP

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003220819

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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