DEPOSITION METHODS UTILIZING MICROWAVE EXCITATION, AND DEPOSITION APPARATUSES

Details for Australian Patent Application No. 2003220621 (hide)

Owner MICRON TECHNOLOGY, INC.

Inventors CAMPBELL, Philip, H.; CARPENTER, Craig, M.; DANDO, Ross, S.

Pub. Number AU-A-2003220621

PCT Number PCT/US03/09913

PCT Pub. Number WO2003/087431

Priority 10/121,320 11.04.02 US

Filing date 31 March 2003

Wipo publication date 27 October 2003

International Classifications

C23C 016/511 Chemical deposition or plating by decomposition

C23C 016/34 Chemical deposition or plating by decomposition - Nitrides

H01Q 021/00 Aerial arrays or systems

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

C23C 016/40 Chemical deposition or plating by decomposition - Oxides

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/121,320 11.04.02 US

4 December 2003 Application Open to Public Inspection

  Published as AU-A-2003220621

6 January 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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