METHOD AND APPARATUS FOR HEATING POLISHING PAD

Details for Australian Patent Application No. 2003220560 (hide)

Owner LAM RESEARCH CORPORATION

Inventors SRIVATSAN, Sridharan; JIN, Anjun, Jerry; PHAM, Xuyen; NGUYEN, Tuan; ZHOU, Ren; WEI, David; JIANG, Linda; RAMANUJAM, Katgenhalli, Y.; SIMON, Joseph, P.; LUONG, Tony

Pub. Number AU-A-2003220560

PCT Number PCT/US03/09465

PCT Pub. Number WO2003/082521

Priority 10/112,628 29.03.02 US

Filing date 28 March 2003

Wipo publication date 13 October 2003

International Classifications

B24B 049/00 Measuring

B24B 001/00

B24B 029/00 Polishing surfaces

B24B 021/00 Machines or devices using grinding or polishing belts

B24B 021/02 Machines or devices using grinding or polishing belts

B24B 055/02 Safety devices for grinding or polishing machines

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/112,628 29.03.02 US

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003220560

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003220561-Improved edge support on a mattress

2003220559-METHODS AND SYSTEMS FOR MOLECULAR MODELING