A METHOD FOR INTEGRATING MICROPARTICLES INTO MEMS

Details for Australian Patent Application No. 2003220353 (hide)

Owner CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventors TAI, Yu-Chong; HE, Qing

Pub. Number AU-A-2003220353

PCT Number PCT/US03/08176

PCT Pub. Number WO2003/081968

Priority 60/366,019 19.03.02 US

Filing date 18 March 2003

Wipo publication date 8 October 2003

International Classifications

H05K 003/02 Apparatus or processes for manufacturing printed circuits - in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding

B05D 001/12 Processes for applying liquids or other fluent materials - Applying particulate materials

B05D 001/36 Processes for applying liquids or other fluent materials - Successively applying liquids or other fluent materials, e.g. without intermediate treatment

B05D 003/12 Pretreatment of surfaces to which liquids or other fluent materials are to be applied - by mechanical means

H05K 003/10 Apparatus or processes for manufacturing printed circuits - in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern

B44C 001/22 Processes, not specifically provided for elsewhere, for producing decorative surface effects - Removing surface-material, e.g. by engraving, by etching

C03C 015/00 Surface treatment of glass

C03C 025/68 Surface treatment of fibres or filaments from glass, minerals, or slags - by etching

C23F 001/00 Etching metallic material by chemical means

D06L 003/12 Bleaching fibres, threads, yarns, fabrics, feathers, or made-up fibrous goods, leather, or furs

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 60/366,019 19.03.02 US

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2003220353

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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