IN-SITU LOCAL HEATING USING MEGASONIC TRANSDUCER RESONATOR

Details for Australian Patent Application No. 2003220308 (hide)

Owner LAM RESEARCH CORPORATION

Inventors BOYD, John, M.; MIKHAYLICH, Katrina

Pub. Number AU-A-2003220308

PCT Number PCT/US03/07981

PCT Pub. Number WO2003/084684

Priority 10/112,639 29.03.02 US

Filing date 14 March 2003

Wipo publication date 20 October 2003

International Classifications

B08B 003/10 Cleaning by methods involving the use or presence of liquid or steam - with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity, by vibration

B08B 003/12 Cleaning by methods involving the use or presence of liquid or steam - by sonic or ultrasonic vibrations

B08B 007/04 Cleaning by methods not provided for in a single other subclass or a single group in this subclass - by a combination of operations

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/112,639 29.03.02 US

27 November 2003 Application Open to Public Inspection

  Published as AU-A-2003220308

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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