WAFER CHARACTERISTICS VIA REFLECTOMETRY

Details for Australian Patent Application No. 2003220252 (hide)

Owner MIDWEST RESEARCH INSTITUTE

Inventors SOPORI, Bhushan, L.

Pub. Number AU-A-2003220252

PCT Number PCT/US03/07804

PCT Pub. Number WO2004/084279

Filing date 14 March 2003

Wipo publication date 11 October 2004

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

31 July 2003 Complete Application Filed

11 November 2004 Application Open to Public Inspection

  Published as AU-A-2003220252

1 December 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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