SYSTEMS AND METHODS FOR CLEANING SEMICONDUCTOR SUBSTRATES USING A REDUCED VOLUME OF LIQUID

Details for Australian Patent Application No. 2003220242 (hide)

Owner MATTSON TECHNOLOGY INC.

Inventors SAVAS, Stephen, E.; ZAJAC, John; GALEWSKI, Carl, A.

Pub. Number AU-A-2003220242

PCT Number PCT/US03/07743

PCT Pub. Number WO2004/082857

Filing date 12 March 2003

Wipo publication date 11 October 2004

International Classifications

B08B 003/04 Cleaning by methods involving the use or presence of liquid or steam - Cleaning involving contact with liquid

B08B 007/04 Cleaning by methods not provided for in a single other subclass or a single group in this subclass - by a combination of operations

Event Publications

31 July 2003 Complete Application Filed

11 November 2004 Application Open to Public Inspection

  Published as AU-A-2003220242

1 December 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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