MUTLI-DETECTOR DEFECT DETECTION SYSTEM AND A METHOD FOR DETECTING DEFECTS

Details for Australian Patent Application No. 2003220223 (hide)

Owner APPLIED MATERIALS, INC.

Inventors LEVIN, Evgeni; SOME, Daniel, I.; PERLMAN, Mirta

Pub. Number AU-A-2003220223

PCT Number PCT/US03/07662

PCT Pub. Number WO2003/078987

Priority 10/097,442 12.03.02 US

Filing date 12 March 2003

Wipo publication date 29 September 2003

International Classifications

G01N 021/956 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/097,442 12.03.02 US

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2003220223

2 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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