METHOD OF PASSIVATING OF LOW DIELECTRIC MATERIALS IN WAFER PROCESSING

Details for Australian Patent Application No. 2003220039 (hide)

Owner SUPERCRITICAL SYSTEMS INC.

Inventors TOMA, Dorel, Ioan; SHILLING, Paul

Pub. Number AU-A-2003220039

PCT Number PCT/US03/06813

PCT Pub. Number WO2003/077032

Priority 60/361,917 04.03.02 US; 60/369,052 29.03.02 US

Filing date 4 March 2003

Wipo publication date 22 September 2003

International Classifications

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

C25F 005/00 Electrolytic stripping of metallic layers or coatings

G03F 007/16 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Coating processes

G03F 007/36 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Imagewise removal not covered by groups , e.g. using gas streams, using plasma

G03F 007/42 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Stripping or agents therefor

C23C 008/00 Solid state diffusion into metallic material surfaces

C23C 014/02 Coating by vacuum evaporation, by sputtering or by ion implantation - Pretreatment of the material to be coated

C25F 001/00 Electrolytic cleaning, degreasing, pickling, or descaling

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 60/361,917 04.03.02 US; 60/369,052 29.03.02 US

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003220039

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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