PROCESS MONITORING USING INFRARED OPTICAL DIAGNOSTICS

Details for Australian Patent Application No. 2003220019 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors LUDVIKSSON, Audunn

Pub. Number AU-A-2003220019

PCT Number PCT/US03/06710

PCT Pub. Number WO2003/081216

Priority 60/365,529 20.03.02 US

Filing date 17 March 2003

Wipo publication date 8 October 2003

International Classifications

G01N 021/35 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 60/365,529 20.03.02 US

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2003220019

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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