METHODOLOGY FOR REPEATABLE POST ETCH CD IN A PRODUCTION TOOL

Details for Australian Patent Application No. 2003219875 (hide)

Owner APPLIED MATERIALS, INC.

Inventors LIU, Wei; MUI, David, S., L.; SASANO, Hiroki

Pub. Number AU-A-2003219875

PCT Number PCT/US03/05617

PCT Pub. Number WO2003/075342

Priority 60/361,064 01.03.02 US; 10/238,453 09.09.02 US

Filing date 26 February 2003

Wipo publication date 16 September 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 60/361,064 01.03.02 US; 10/238,453 09.09.02 US

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003219875

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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