DEVICE FOR HANDLING FLAT PANELS IN A VACUUM

Details for Australian Patent Application No. 2003219828 (hide)

Owner BROOKS AUTOMATION, INC.

Inventors POOLE, Dennis, P.

Pub. Number AU-A-2003219828

PCT Number PCT/US03/05191

PCT Pub. Number WO2003/084043

Priority 10/104,846 22.03.02 US

Filing date 21 February 2003

Wipo publication date 13 October 2003

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/104,846 22.03.02 US

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003219828

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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