DEVICE FOR THE LOWDEFORMATION REPLACEABLE MOUNTING OF AN OPTICAL ELEMENT

Details for Australian Patent Application No. 2003219097 (hide)

Owner CARL ZEISS SMT AG

Inventors WURMBRAND, Andreas; PETASCH, Thomas; SCHAFFER, Dirk; SORG, Franz

Pub. Number AU-A-2003219097

PCT Number PCT/EP03/03110

PCT Pub. Number WO2004/086148

Filing date 26 March 2003

Wipo publication date 18 October 2004

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G02B 007/02 Mountings, adjusting means, or light-tight connections, for optical elements - for lenses

G02B 007/14 Mountings, adjusting means, or light-tight connections, for optical elements - adapted to interchange lenses

Event Publications

31 July 2003 Complete Application Filed

18 November 2004 Application Open to Public Inspection

  Published as AU-A-2003219097

15 December 2005 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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