GETTER METAL ALLOY COATING AND DEVICE AND METHOD FOR THE PRODUCTION THEREOF

Details for Australian Patent Application No. 2003219001 (hide)

Owner GESELLSCHAFT FUER SCHWERIONENFORSCHUNG MBH

Inventors REICH-SPRENGER, Hartmut

Pub. Number AU-A-2003219001

PCT Number PCT/EP03/02031

PCT Pub. Number WO2003/074753

Priority 102 09 423.3 05.03.02 DE

Filing date 27 February 2003

Wipo publication date 16 September 2003

International Classifications

C23C 014/00 Coating by vacuum evaporation, by sputtering or by ion implantation

C23C 014/16 Coating by vacuum evaporation, by sputtering or by ion implantation - on metallic substrates or on substrates of boron or silicon

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

B01J 003/00 Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 102 09 423.3 05.03.02 DE

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003219001

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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