DEVICE AND METHOD FOR MASKLESS AFM MICROLITHOGRAPHY

Details for Australian Patent Application No. 2003218764 (hide)

Owner LEICA MICROSYSTEMS LITHOGRAPHY GMBH UNIVERSITAT KASSEL

Inventors HUDEK, Peter; IVANOV, Tzwetan; RANGELOW, Ivo; FORTAGNE, Olaf

Pub. Number AU-A-2003218764

PCT Number PCT/EP03/02680

PCT Pub. Number WO2003/081171

Priority 103 03 040.9 26.01.03 DE; 102 12 736.0 21.03.02 DE

Filing date 14 March 2003

Wipo publication date 8 October 2003

International Classifications

G01B 007/34 Measuring arrangements characterised by the use of electric or magnetic means - for measuring roughness or irregularity of surfaces

G11B 009/00 Recording or reproducing using a method or means not covered by one of the main groups

G12B 021/20

G01N 027/00 Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

G12B 021/08

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 103 03 040.9 26.01.03 DE; 102 12 736.0 21.03.02 DE

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2003218764

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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