DEVICE, EUV-LITHOGRAPHIC DEVICE AND METHOD FOR PREVENTING AND CLEANING CONTAMINATION ON OPTICAL ELEMENTS

Details for Australian Patent Application No. 2003218706 (hide)

Owner CARL ZEISS SMT AG

Inventors WEDOWSKI, Marco; STIETZ, Frank; MERTENS, Bas; KLEIN, Roman

Pub. Number AU-A-2003218706

PCT Number PCT/EP03/02372

PCT Pub. Number WO2003/075098

Priority 102 09 493.4 07.03.02 DE

Filing date 7 March 2003

Wipo publication date 16 September 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

B08B 007/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 102 09 493.4 07.03.02 DE

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2003218706

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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