PULSED PROCESSING SEMICONDUCTOR HEATING METHODS USING COMBINATIONS OF HEATING SOURCES

Details for Australian Patent Application No. 2003218303 (hide)

Owner MATTSON TECHNOLOGY, INC.

Inventors TIMANS, Paul, J.; ACHARYA, Narasimha

Pub. Number AU-A-2003218303

PCT Number PCT/US03/08623

PCT Pub. Number WO2003/085343

Priority 60/368,863 29.03.02 US; 10/209,155 30.07.02 US

Filing date 19 March 2003

Wipo publication date 20 October 2003

International Classifications

F27B 005/14 Muffle furnaces

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 60/368,863 29.03.02 US; 10/209,155 30.07.02 US

27 November 2003 Application Open to Public Inspection

  Published as AU-A-2003218303

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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