METHOD, SYSTEM AND MEDIUM FOR CONTROLLING SEMICONDUCTOR WAFER PROCESSES USING CRITICAL DIMENSION MEASUREMENTS

Details for Australian Patent Application No. 2003218285 (hide)

Owner APPLIED MATERIALS, INC.

Inventors AL-BAYATI, Amir; ADIBI, Babak; FOAD, Majeed; SOMEKH, Sasson

Pub. Number AU-A-2003218285

PCT Number PCT/US03/08513

PCT Pub. Number WO2003/081513

Priority 10/100,184 19.03.02 US

Filing date 19 March 2003

Wipo publication date 8 October 2003

International Classifications

G06F 019/00 Digital computing or data processing equipment or methods, specially adapted for specific applications

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/100,184 19.03.02 US

13 November 2003 Application Open to Public Inspection

  Published as AU-A-2003218285

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003218286-Muscle cells and their use in cardiac repair

2003218284-CATALYTIC SYSTEMS