METHOD AND APPARATUS FOR PREPARING VAPORIZED REACTANTS FOR CHEMICAL VAPOR DEPOSITION

Details for Australian Patent Application No. 2003218262 (hide)

Owner PILKINGTON NORTH AMERICA, INC.

Inventors NELSON, Douglas, M.

Pub. Number AU-A-2003218262

PCT Number PCT/US03/08414

PCT Pub. Number WO2003/085164

Priority 60/369,110 29.03.02 US

Filing date 19 March 2003

Wipo publication date 20 October 2003

International Classifications

C23C 016/448 Chemical deposition or plating by decomposition - characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 60/369,110 29.03.02 US

27 November 2003 Application Open to Public Inspection

  Published as AU-A-2003218262

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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