PH BUFFERED COMPOSITIONS FOR CLEANING SEMICONDUCTOR SUBSTRATES

Details for Australian Patent Application No. 2003218260 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors SEIJO, Ma, Fatima; WOJTCZAK, William, A.; BERNHARD, David; BAUM, Thomas, H.; MINSEK, David

Pub. Number AU-A-2003218260

PCT Number PCT/US03/08408

PCT Pub. Number WO2003/083582

Priority 10/105,704 25.03.02 US

Filing date 18 March 2003

Wipo publication date 13 October 2003

International Classifications

G03F 007/42 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Stripping or agents therefor

C23G 001/18 Cleaning or pickling metallic material with solutions or molten salts

C23G 005/00 Cleaning or de-greasing metallic material by other methods

C23G 005/02 Cleaning or de-greasing metallic material by other methods

C23G 005/032 Cleaning or de-greasing metallic material by other methods

C23G 005/036 Cleaning or de-greasing metallic material by other methods

C23G 001/02 Cleaning or pickling metallic material with solutions or molten salts - with acid solutions

C23G 001/06 Cleaning or pickling metallic material with solutions or molten salts

C23G 001/14 Cleaning or pickling metallic material with solutions or molten salts - with alkaline solutions

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/105,704 25.03.02 US

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003218260

9 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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