SYSTEM AND METHOD FOR LAMP SPLIT ZONE CONTROL

Details for Australian Patent Application No. 2003217884 (hide)

Owner APPLIED MATERIALS, INC.

Inventors JENNINGS, Dean

Pub. Number AU-A-2003217884

PCT Number PCT/US03/06494

PCT Pub. Number WO2003/077598

Priority 10/092,275 04.03.02 US

Filing date 4 March 2003

Wipo publication date 22 September 2003

International Classifications

H05B 003/00 Ohmic-resistance heating

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/48 Chemical deposition or plating by decomposition - by irradiation, e.g. photolysis, radiolysis, particle radiation

C23C 014/54 Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

C30B 031/12 After-treatment of single crystals or homogeneous polycrystalline material with defined structure

C30B 025/10 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Heating of the reaction chamber or the substrate

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/092,275 04.03.02 US

30 October 2003 Application Open to Public Inspection

  Published as AU-A-2003217884

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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