NOVEL PLANARIZATION METHOD FOR MULTI-LAYER LITHOGRAPHY PROCESSING

Details for Australian Patent Application No. 2003217804 (hide)

Event Publications

31 July 2003 Complete Application Filed

Priority application(s): 60/360,374 27.02.02 US; 10/373,897 24.02.03 US

16 October 2003 Application Open to Public Inspection

Published as AU-A-2003217804

11 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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