FULL PHASE SHIFTING MASK IN DAMASCENE PROCESS

Details for Australian Patent Application No. 2003217789 (hide)

Owner NUMERICAL TECHNOLOGIES, INC.

Inventors PIERRAT, Christophe

Pub. Number AU-A-2003217789

PCT Number PCT/US03/06041

PCT Pub. Number WO2003/079117

Priority 60/363,674 11.03.02 US; 10/295,575 14.11.02 US

Filing date 27 February 2003

Wipo publication date 29 September 2003

International Classifications

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

G03C 005/00 Photographic processes or agents therefor

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 60/363,674 11.03.02 US; 10/295,575 14.11.02 US

6 November 2003 Application Open to Public Inspection

  Published as AU-A-2003217789

25 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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