CYCLICAL DEPOSITION OF TUNGSTEN NITRIDE FOR METAL OXIDE GATE ELECTRODE

Details for Australian Patent Application No. 2003217781 (hide)

Owner APPLIED MATERIALS, INC.

PCT Number PCT/US03/06005

Filing date 26 February 2003

Event Publications

31 July 2003 Complete Application Filed

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  Application withdrawn under section 141(3)/See Reg. 8.3(2). This application was not yet Open to Public Inspection. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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