PROCESS FOR MAKING PHOTONIC CRYSTAL CIRCUITS USING AN ELECTRON BEAM AND ULTRAVIOLET LITHOGRAPHY COMBINATION

Details for Australian Patent Application No. 2003217542 (hide)

Owner UNIVERSITY OF DELAWARE PRATHER, Dennis, W. MURAKOWSKI, Janusz

Inventors PRATHER, Dennis, W.; MURAKOWSKI, Janusz

Pub. Number AU-A-2003217542

PCT Number PCT/US03/04682

PCT Pub. Number WO2003/071587

Priority 60/357,184 15.02.02 US

Filing date 14 February 2003

Wipo publication date 9 September 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 60/357,184 15.02.02 US

9 October 2003 Application Open to Public Inspection

  Published as AU-A-2003217542

4 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2003217543-Helical peptidomimetics and use bamyloid-associated diseases

2003217541-Chemosensitizing with liposomes containing oligonucleotides