APPARATUS AND METHOD FOR DEPOSITING ORGANIC MATTER OF VAPOR PHASE

Details for Australian Patent Application No. 2003217530 (hide)

Owner ANS INC

Inventors BAE, Kyung-Bin; CHOI, Dong-Kwon; KIM, Dong-Soo

Pub. Number AU-A-2003217530

PCT Number PCT/KR03/00605

PCT Pub. Number WO2003/083169

Priority 10-2002-0017755 01.04.02 KR; 10-2002-0061629 10.10.02 KR

Filing date 27 March 2003

Wipo publication date 13 October 2003

International Classifications

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10-2002-0017755 01.04.02 KR; 10-2002-0061629 10.10.02 KR

20 November 2003 Application Open to Public Inspection

  Published as AU-A-2003217530

16 December 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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