METHOD OF SPIN ETCHING WAFERS WITH AN ALKALI SOLUTION

Details for Australian Patent Application No. 2003217280 (hide)

Owner STRASBAUGH

Inventors KASSIR, Salman, M.

Pub. Number AU-A-2003217280

PCT Number PCT/US03/02787

PCT Pub. Number WO2003/065431

Priority 10/059,701 29.01.02 US

Filing date 29 January 2003

Wipo publication date 2 September 2003

International Classifications

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

31 July 2003 Complete Application Filed

  Priority application(s): 10/059,701 29.01.02 US

18 September 2003 Application Open to Public Inspection

  Published as AU-A-2003217280

4 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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